This paper won the Best Paper award at this year's Cadence Live EMEA conference in Munich, Germany. It describes a new methodology for designing MEMS devices and simulating them together with integrated electronics within the Cadence Virtuoso design environment. Using the example of Texas Instruments' digital micro-mirror device (DMD), we demonstrate how the new MEMS-IC design methodology can be applied to a mirror array, simulating multiple MEMS micro-mirrors together with their control electronics.
Content
Introduction ...........................................................................
| 2 |
| The Traditional Approach to MEMS-IC Design .............................. | 2 |
| A New, Structured Approach to MEMS-IC Verification .................... | 3 |
| DLP Mirror Array Example.......................................................... | 3 |
| Conclusion ............................................................................. | 6 |
| References............................................................................. | 7 |