Process emulation techniques are a great way to get 3D models and they are faster to build than simulated models.
Posted by coventor marketing on Mon, Jul 13, 2009 @ 08:27 AM
Geometric emulation of MEMS Technology. This approach utilizes a geometric description of the result of each process step that is concatenated to build a geometric model of teh complete MEMS device. The geometric emulation approach has become a widely accepted approach for MEMS visualization applications. Koppelman first utilized geometric emulation in the OYSTER program, which was subsequently extended to the MEMBuilder and MEMulator modules incorporated into the CoventorWare software. The geometric emulation approach is capable of modeling the spectrum of process steps (i.e., conformal depositions, planarization, etch profiles, gap fills, etc.) encountered in MEMS processes in a computatially efficient manner, thus providing the MEMS designer with meaningful information.
Micro Electro Mechanical System Design by James Allen. CRC press, Taylor and Francis. page 185.
