X-Fab and Coventor present paper at SemiconWest on MEMS fabrication
Posted by coventor marketing on Wed, Jul 15, 2009 @ 08:33 AM
3-D Process Modeling - A Novel and Efficient Tool for MEMS Foundry Design Support.
We describe a software tool for creating highly realistic, 3-D virtual prototypes of MEMS and semiconductor devices, and show how it has been applied to a MEMS SOI micromachining process. Two case studies demonstrate the value of virtual prototypes to a foundry: a 3-D design rule check that revealed a design error before mask tape out, and a process integration analysis that confirmed the suspected cause of a process failure.
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