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Intel Announces Production-Ready 22nm 3-D Tri-Gate Transistor
Process Simulation vs. Process Emulation: is SEMulator3D really TCAD?
3-D Process Modeling - A Novel and Efficient Tool for MEMS Foundry Design Support
Virtual fabrication is a more productive way to build integrated MEMS/CMOS systems than process simulation.
X-Fab and Coventor present paper at SemiconWest on MEMS fabrication
Process emulation techniques are a great way to get 3D models and they are faster to build than simulated models.
MEMS Design Validation before Fabrication; X-Fab comments on success
Publish 3-D MEMS and Semiconductor device models in Acrobat 3-D pdf files
SEMulator3D 2008.100: New Selective Wet Etch and MEMS Lift-Off capabilities
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